Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
نویسندگان
چکیده
We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.
منابع مشابه
A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control
A novel MEMS-based electrostatic actuator design is proposed for recording head fly height control below 10 nm. Different from prior work on MEMS-based electrostatic microactuators designed for magnetic hard disk drives (HDD), the proposed microactuator is fabricated monolithically with a conventional head/slider design. The actuator is micromachined into the same side as the head element on a ...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کاملMEMS Based Microneedle Actuator with Piezoresistive Force Feedback System for Biomedical Applications
This paper presents a novel design of MEMS based microneedle actuator with force feedback system which can be used for biomedical applications such as cell manipulation, drug delivery and DNA injection. The actuation mechanism of microneedle is driven by two electrostatic comb actuators. Since the manipulated objects are very sensitive, and can be easily damaged, it’s essential to have a force ...
متن کاملEffect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor
Parametric resonance has been well established in many areas of science, including the stability of ships, the forced motion of a swing and Faraday surface wave patterns on water. We have previously investigated a linear parametrically driven torsional oscillator and along with other groups have mentioned applications including mass sensing, parametric amplification, and others. Here, we thorou...
متن کاملSimulation of a Microgripper with Electrothermal Actuator Using COMSOL Software Based on the Finite Element Method
Micro-electro-mechanical systems (MEMs) are Combination of electrical and mechanical components in Micron dimensions. In recent years, holding, actuating methods and handling of MEMs components such as microgripper, microsensors and etc. have been deeply studied. Microgrippers for handling, positioning and assembling of micro components are very useful so that for clamping need actuation create...
متن کامل